Slow Pumping and Slow Venting System
Precision Vacuum Control for Particle-Sensitive Applications
Automated System
Semi-Automated System
Automated System
A fully automated vacuum process system for controlled pressure transitions between atmosphere and UHV, designed for particle-sensitive research environments.
🔵 Release Timeline
- 2021 — Initial R&D started in 2021
- 2022–2024 — Multi-generation engineering iteration
- Q3 2025 — 2025 Generation system fully accepted (Current Model)
- Q1 2026 — Next-generation system scheduled for delivery
🔵 Key Integrated Functions
- Slow venting — controlled transition from UHV to micro-positive pressure
- Slow pumping — controlled transition from atmosphere to UHV
- Leak check — integrated interfaces and automated procedures
- Mass spectrometry — RGA-ready ports and sampling design
- Baking process — compatible with in-situ bake-out and degassing procedures
🔵 System Configuration
- Fully automated control architecture
- Integrated PLC and touch-screen HMI
- Modular valve and sensor layout
- Scalable design for different chamber volumes
- Compatible with custom pipelines and vacuum chambers
🔵 Technical Highlights
- Intelligent pressure ramp control to minimize particle disturbance
- Interlock-protected process sequences
- Compact structural architecture for cleanroom environments
- Ergonomic design for safe and efficient maintenance
- High-stability operation under long-term continuous use
🔵 Clean Assembly & Validation
- All units are assembled and verified in a Class 100 clean environment.
- Each system undergoes functional validation and process simulation testing before delivery to ensure particle-free performance and operational reliability.
🔵 Typical Application Focus
- Particle-sensitive vacuum processes
- Superconducting experimental platforms
- Semiconductor research laboratories
- Advanced physics and materials research facilities
We evolve continuously because advanced research demands ever-higher process stability and cleanliness. If you are exploring intelligent vacuum process control, our engineering team is ready to support your project.
Semi-Automated System
The Semi-Automated System is designed for teams that require reliable slow pumping and slow venting but do not need a fully automated PLC workflow. It delivers the same hardware quality, vacuum stability, and process performance as the Automated System — with simplified control and greater flexibility.
System Comparison
| Feature | Automated System | Semi-Automated System |
|---|---|---|
| Hardware Configuration | √ Same | |
| Vacuum Performance | √ Same | |
| Process Stability | √ Same | |
| Slow Pumping & Slow Venting Valve Hardware | √ Same Valves | |
| Pressure Ramping | Automatic | Manual |
| Slow Pumping Control | Automatic | Manual |
| Control System | PLC + Touch-screen HMI | Mechanical / Basic Digital |
| Workflow | Fully Automated Sequences | Manual / Assisted |
| Leak Detector / RGA / Baking Integration | Optional & Fully Integrated | Supported Externally (Non-integrated) |
| Clean Assembly Level | Class 100 | Standard (Class 100 Optional) |