UHV Calibration Systems
Ultra-high Vacuum Calibration Platforms for Precision Measurement and System Validation
UHV Calibration System
Dewar UHV Outgassing & Pumping Station
UHV Calibration System
Our Ultra-High Vacuum Calibration Platforms are designed for precision calibration of vacuum gauges, sensors, and measurement instruments. The system provides a stable UHV environment, customizable pumping configurations, and flexible chamber interfaces suitable for laboratory and industrial applications.
Key Features
- Stable UHV Environment: Designed for 10⁻⁶ to 10⁻⁹ Pa operation depending on pump configuration.
- Modular Calibration Chamber: Supports various gauge types such as ionization gauges, capacitance manometers, Pirani gauges, and residual gas analyzers.
- Multiple Pumping Options: Turbomolecular + backing pump module, or hybrid pumping setups for higher stability.
- Integrated Heating Options: Optional chamber baking for improved gauge repeatability and reduced outgassing.
- Flexible Port Configuration: CF/ISO/KF ports available for different calibration standards and instruments.
- Customizable Layout: Available in bench-top, vertical, or rack-mounted form depending on user requirements.
Technical Specifications
| Parameter | Specification / Description |
|---|---|
| Vacuum Range | 10⁻⁶ – 10⁻⁹ Pa (depending on pump configuration) |
| Pumping System | Turbomolecular pump + dry backing pump; optional ion pump or NEG pump |
| Calibration Ports | CF16 / CF35 / CF63, KF16 / KF25, ISO ports available |
| Supported Gauge Types | Ionization, Pirani, Capacitance Manometer, RGA, Custom instruments |
| Chamber Baking | Optional external heating or integrated heating shell |
| System Layout Options | Bench-top / vertical tower / rack-mount |
Dewar UHV Outgassing & Pumping Station
The Dewar UHV Outgassing & Pumping Station is designed for precise high- and ultra-high vacuum preparation. Key features include:
- Outgassing System: Integrated heating hood for online bake-out, fully covering pipes or chambers. Max temperature 400℃, outer insulation layer ensures safety, full automatic temperature control.
- Vacuum System: Configurable pump groups and flange interfaces according to experimental requirements. Standard exhaust vacuum 10⁻⁸ Pa, ultra-high vacuum up to 10⁻⁹ Pa.
- Auxiliary Functions: Optional fast sample introduction port, vibration damping, 3D motion, rotation entry, etc.
- Alignment & Multi-Station Performance: Single, dual, or multi-station configurations available, up to 28 positions.
Technical Highlights
| Feature | Specification / Description |
|---|---|
| Outgassing System | Integrated heating hood, max 400℃, outer insulation, fully automatic temperature control |
| Vacuum System | Configurable pump groups and flange types; 10⁻⁸ Pa standard, up to 10⁻⁹ Pa ultra-high vacuum |
| Auxiliary Functions | Fast sample port, vibration damping, 3D motion, rotation entry |
| Alignment & Multi-Station | Single, dual, or multi-station, up to 28 positions |